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溅射合金薄膜压力传感器带电阻网络补偿的版图设计

发布时间:2020-10-6      发布人:泽天科技      点击:

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溅射合金薄膜压力传感器

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薄膜压力传感器的工作原理:通过对周边固支的平膜片(金属弹性体)进行研磨、抛光,然后在其上溅射沉积绝缘膜、应变电阻膜、保护膜,通过平膜片感受压力产生形变,溅射在其上的合金薄膜电阻也相应产生形变,电阻阻值发生改变,在膜片中心与边缘的电阻阻值变化方向相反,通过组成全桥应变电路,输出一个与压力值基本成线性的电信号。

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3.在电桥的输入端设计了两个铂热电阻,沉积在平膜片的非应变区。通过在桥路中串入铂热电阻,可以有效补偿电阻桥的正的灵敏度温漂。本文源自泽天传感,湖北福彩网,转载请保留出处!